Research Content
Micro Electro Mechanical Systems (MEMS), which are “tiny machines”, are used in various places such as accelerometers in smartphones and micromirror arrays in projectors. In a small world of several tens of nanometers to several hundreds of micrometers, the influence of frictional force is greater than the force of gravity, and light interacts with structures with a size of the wavelength of light. By actively using these effects, we are conducting extensive research on assembly technology for microstructures and sensors and actuators using microstructures.